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FocalSpec Standard Line Confocal Sensors Series

FocalSpec®

Standard 3D Line Confocal Sensors

Providing multi-purpose, metrology-grade performance for a variety of at-line and offline measurement applications.

  • High dimensional accuracy
  • Captures 3D tomography, 3D topography, and 2D intensity data simultaneously
  • Ability to identify and scan curved edges and individual material layers
  • Excellent performance scanning transparent and highly reflective materials

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FocalSpec Line Confocal Sensors

Confocal FOV Diagram
 

Model LCI401 LCI1201 LCI1600
Field of view (mm) 4.3 11.5 16.6
X resolution (μm) 2.1 5.6 8.1
Z repeatability (mm) 0.05 0.13 0.24
Measurement range (mm) 1.1 3.0 5.5
Stand-off distance (mm) 8.0 20.6 64.0
Scan rate at full
measurement range (Hz)
300 500 500
Max. scan rate (Hz) 800 4000 3000
Number of points/profile 2048 2048 2048
Max. surface slope on mirror (deg) ± 15.0 ± 20.0 ± 13.5
Dimensions (H x W x D) (mm) 300 x 202 x 62 419 x 354 x 91 432 x 358 x 113
 
 

MECHANICALS

FocalSpec Standard Series Mechanicals

 

FactorySmart® Sensors

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